super air dryer

Generally drying substances involvesapplication of heat sources such as high temperature heat or infrared light.

Such a method, however, causes consumption of large quantity of energy, which leads to carbon dioxide and greenhouse effect. Also it can cause fatal damages including discoloring or deformation of the dried object.

SDS Series is the ambient temperature adsorption type dryer developed for drying target objects without heating system.

adsorption type dryer uses an absorbent put into two tanks that absorbs moisture in the air.

Thus performance of such adsorption type dryer depends on the absorbing capacity of the absorbent in each tank as well as how efficiently the absorbent can be recycled after absorbing the moisture in the air.

This method is categorized into heatless and heated recycling method.

Heated recycling method is drying the absorbent for recycling by attaching an electrical heater. Heatless recycling method is recycling the absorbent by passing the drying air at certain proportion.

SDS series lineup uses the heatless recycling method.

Features of Super Air Dryer

Generating super dry air at lowest dew-point

- Super dry air at temperature lower than dew point of -80℃ is constantly generated.

- Super dry air generated by the SDS system contains about 0.3 PPM of moisture, which is approximately 1/20 of moisture contained in high-purity nitrogen.

Ambient temperature adsorption type air dryer

- By using highly efficient absorbent, trace of moisture in the fluid is completely removed.

- Economic and eco-friendly system as it does not require energy separately and no greenhouse gas is generated.

- Reattachment of moisture does not occur which is often the case with heated drying method while target object is cooled down.

Integrated minute particle filter

- SDS Series employs the particle filter with filtering efficiency of 0.01㎛ and capability to filtering the minute amount of particles contained in the influx of air.

Consecutive drying system

- SDS Series utilizes the system of reattaching minute amount of moisture from the dry gas coming in from the nitrogen supply device or outdoor drying device.

Minimized fault rate from influx of moisture into chamber

- Dry nitrogen often used by moisture-sensitive industries such as semiconductor or LCD contains more moisture than 6ppm.

- If When vacuum is break damaged in the load lock chamber, dew point also goes up as air pressure increases, causing attachment of minute amount of moisture to the sensitive components such as wafer. SDS Series has successfully minimized error rate from such cases.